This paper reports the theoretical and experimental investigations of the strain induced resonant wavelength shift effect of photonic crystal (PhC) cavity for strain sensing applications. Strain sensitivity of a high quality factor PhC cavity is studied based on finite element analysis (FEA) and finite difference time domain (FDTD) simulations.We proposed a suspended silicon bridge structure comprising this photonic crystal waveguide (PhCWG) filter structure. Since the output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. Shift of the output resonant wavelength is observed for suspended PhCWG beam structure under particular force loading.This innovative design conceptualizes a new application area for PhCs, i.e., the nanometer-scale physical sensors for strains and forces.
Volume 11 | 04-Special Issue
Pages: 957-962