Modeling and Analysis of MEMS Based Capacitive Pressure Sensor for Biomedical Application

Arun kumar Madupu,P. Gowri Ishwari,Sreenivasa Rao Ijjada

Micro Electro-Mechanical Systems (MEMS) related capacitive pressure sensors are naturally fabricated via silicon micromachining methods. This paper divulges the design, modeling, and characterization of a simulation of MEMS related capacitive pressure sensor for biomedical applications using COMSOL Multiphysics V5.0. Here, a trail has been done to get a high sensitivity through design various diaphragm structures (Rectangle, Square and Circular) with uniform surface areas. A slotted circular shape capacitive pressure sensor is designed for local antibody immobilization in this work, thus the adsorption-induced on the surface of the circular diaphragm. An analytical model has been developed and the effect of adsorption–induced stress change to precise mass detection of cancer bio-marker Alpha- fetoprotein (AFP). Further, simulations carried out with different loads from 0.1 to 1kPa by assigning silicon sensing materials. Through the simulation result analysis, it is noted that the pressure sensor with slotted circular diaphragm exhibit more deformation (40.5*10-4μm) and high sensitivity, and capacitance change over the conventional circular diaphragm and slotted circular diaphragms. The factors for sensitivity enhancement as a function of applied pressure, materials and dimensional changes of diaphragm discussed well. These research studies are highly applicable to promote the capacitive pressure sensors in bio-medical applications for early diagnosis of carcinoma of the liver. Carcinoma of the liver is mostly associated with the alcoholics and in severe drug abuse affecting the liver. In indigenous methods, AFP is detected in the liver, which is usually found in the yolk sac of babies before birth. In CA. Liver cases AFP is the biomarker. The MEMS sensor device with high sensitivity and high response time to detect the Carcinoma of liver is deadly needed for health care professionals. This method may be used for the regular liver test which is often affected by certain drugs use regularly.

Volume 12 | Issue 2

Pages: 2373-2380

DOI: 10.5373/JARDCS/V12I2/S20201284